Advanced MEMS sensors for multiple applications; taking accuracy to the next level!

Seismic Sensing

Ground motion can be measured as displacement, velocity, or acceleration. A mass spring sensor is used for all these measurements.

Physical Logic’s in-plane bulk micromachining technology allows for realization of a proof mass spring design to achieve a noise density below 1 µg/√Hz for recommended ranges of ±2g and ±5g.

We open the possibility to compete with standard seismometers, allowing the construction of cost- and power-efficient seismic sensors. The high precision seismic accelerometers are installed at a constant distance from each other in a tectonic border zone; this enables an instant earthquake wave’s detection and fast alert to nearby populations.

The particular direction of installation of two sensors is optimized to detect P-waves, which propagate parallel to the ground, or S-waves, which are perpendicular to the ground surface.

Physical Logic’s MEMS accelerometers are designed and manufactured in Israel. They are all ITAR free and the MAXL-OL-2002C is export controlled free.

Application Requirements

Applications

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