Advanced MEMS sensors for multiple applications; taking accuracy to the next level!

Technical Papers

Inertial Sensors and Systems Symposium Gyro Technology- Karlsruhe, Germany

Closed-loop MEMS accelerometer: from design to production

September, 2016

By Boris Grinberg, Aviram Feingold, Lisa Koenigsberg, Leonid Furman. Presented by Boris Grinberg at Inertial Sensors and Systems 2016, Karlsruhe Germany.

IEEE/ION PLANS 2018

“High precision open-loop and closed-loop MEMS accelerometers with wide sensing range”

April, 2016

By Boris Grinberg, Aviram Feingold, Leonid Furman & Roza Wolfson.Presented By Boris Grinberg at ION PLANS 2016, Savannah GA.

In-Plane Bulk-Micromachining Fabrication of High Dynamic Range Tactical Grade Open Loop and Closed Loop MEMS Accelerometers

“In-Plane Bulk-Micromachining Fabrication of High Dynamic Range Tactical Grade Open Loop and Closed Loop MEMS Accelerometers”

November, 2015

By Aviram Feingold & Boris Grinberg. Presented at IEEE Sensors 2015, Busan, South Korea.

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