Our closed loop MAXL-CL-3030 ΔΣ (sigma-delta) MEMS accelerometer provides improved performance, such as scale factor linearity, bias stability and vibration rectification. It is a fully integrated sensor enclosed in a specially designed and manufactured LCC44 package.
Closed Loop MEMS Products
Our closed loop is produced using the same proprietary and proven process flow which we successfully developed for the open loop accelerometer. However, the closed loop MEMS is equipped with an actuator mechanically and electrically isolated from the sensing part.