Advanced MEMS sensors for multiple applications; taking accuracy to the next level!

Open Loop MEMS Accelerometer

Our MAXL-OL-2000 series comprises high-end MEMS accelerometers featuring open loop configurations and offering a variety of sensing ranges. The accelerometer is based on a bulk micro-machined silicon MEMS device and an application-specific integrated circuit (ASIC) with an analog front end (AFE) and a temperature sensor, assembled in a custom-tailored, hermetically sealed, and compact LCC20 package.

Open Loop MEMS Products

MAXL-OL-2002

MAXL-OL-2002

Applications

MAXL-OL-2002C
export control free

MAXL-OL-2002C

Applications

MAXL-OL-2005

MAXL-OL-2005

Applications

MAXL-OL-2005C
export control free

MAXL-OL-2005C

Applications

MAXL-OL-2010

MAXL-OL-2010

Applications

MAXL-OL-2010C
export control free

MAXL-OL-2010C

Applications

MAXL-OL-2015- open loop accelerometer

MAXL-OL-2015

Applications

MAXL-OL-2015- open loop accelerometer
export control free

MAXL-OL-2015C

Applications

MAXL-OL-2020 - open loop accelerometer

MAXL-OL-2020

Applications

MAXL-OL-2020 - open loop accelerometer
export control free

MAXL-OL-2020C

Applications

MAXL-OL-2040 - open loop accelerometer

MAXL-OL-2040

Applications

MAXL-OL-2040 - open loop accelerometer
export control free

MAXL-OL-2040C

Applications

MAXL-OL-2070 - open loop accelerometer

MAXL-OL-2070

Applications

In-Plane MEMS Device

The unique in-plane geometry of the sensors' MEMS element enables it to use a highly symmetrical comb structure based on a full capacitive bridge topology. Physical Logic's smart in-plane concept enables excellent capacitance linearity over a large proof mass displacement. Another advantage of our in-plane concept is extremely low thermo-mechanical noise levels, achieved by sealing at atmospheric conditions without using less-reliable vacuum packaging techniques.

ASIC

Our ASIC includes an Analog Front End (AFE) and a highly sensitive temperature sensor. The AFE is implemented in a continuous-time chopper stabilized trans-capacitance to voltage convertor (CVC) topology. We feature a low pass filter for signal bandwidth adjustment. The AFE delivers a fully differential analog output featuring a 126 dB dynamic range, <0.5% linearity in the output voltage range, and excellent offset stability. The ASIC features low power consumption.

Compact Packaging

We offer the LCC20 standard packaging size for Open-Loop accelerometers. Assembly is preformed using a highly standardized, automatic assembly process. In our assembly process the MEMS and ASIC chips are fabricated separately and integrated into the package. The interface between the MEMS, ASIC and the package is utilized by wire bonding. 

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