Only a couple of decades ago we saw the first use of micro-electro-mechanical systems (MEMS) technology in the fabrication of inertial sensors, and particularly accelerometers. Yet MEMS accelerometers have now conquered diverse markets including inertial sensing, industrial and even health care. The reason for this success is low price, small size, high reliability, and low power consumption of MEMS-based sensors.
Open-Loop MEMS accelerometers are mainly used for industrial application, however the use of In-Plane bulk micromachining technology extend applications to tactical grade performance. Implementation of Closed-Loop MEMS accelerometers enabled MEMS sensors technology to compete with expensive traditional technologies of mechanical quartz pendulum sensors. Application of ΔΣ (sigma-delta) MEMS technology, enables extremely low linearity, stability and repeatability errors with extremely low Vibration Rectification Error (VRE).
Physical Logic MEMS Technology
Physical Logic is developing and manufacturing Open-Loop and Closed-Loop MEMS accelerometer for tactical and inertial navigation applications which are based on fully differential capacitive sensing architecture, enabling noise and parasitic rejection. Our technology applies to a broad range of mechanical, chemical, optical, and biotech products such as sensors, microstructures, and actuators.
Our technology has the following benefits