Inclinometers, also called tilt sensors, or slope sensors, are designed to measure the orientation angle of an object with respect to the Earth gravity vector. These tilt meters determine the pitch and/or roll angle and output these values via the appropriate electrical interface.
Physical Logic’s in-plane bulk micromachining approach allows utilization of the full bridge capacitive sensing configuration for parasitic rejection and improved performance to achieve a noise density below 1.2 µg/√Hz for recommended sensing ranges of ±2g and ±5g.
Additionally, the in plane design enables improved linearity due to utilizing the capacitor area changing concept. A large proof mass, which is realized in the SOI wafer handle layer, contributes to enhanced sensitivity.
When the device tilts, this mass will move slightly, causing a change of capacitance and the angle can be calculated from the acceleration output.
Physical Logic’s MEMS accelerometers are designed and manufactured in Israel. All products are ITAR free and are also offered as export control free.