Several years ago, Physical Logic undertook a dual research and development project on capacitive MEMS accelerometers, with the aim of achieving inertial tactical-grade performance for open-loop accelerometers and inertial navigation grade performance with closed-loop accelerometers.
MEMS accelerometer advanced over the past two decades and opened new opportunities in many areas of motion sensing. Together with the growing requirement for high precision, high dynamic ranges, and low VRE, increased the downward pressure on cost, weight, size, and power. “…the company’s revolutionary approach to micro-electromechanical systems (MEMS) machining can vault low cost, weight and power (C-SWaP) accelerometers several tiers above in the accuracy hierarchy”. Open-loop and closed-loop MEMS accelerometers can now replace high-cost instruments in most high-end applications.
For the full article, please you the following link: